Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices

Sensors and Actuators, A: Physical

Volumn 85, Issue 1, 2000, Pages 316-323

  Wijngaards, D D L ^a   Kong, S H ^a   Bartek, M ^a   Wolffenbuttel, R F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

MICROPROCESSOR CHIPS; OPTIMIZATION; PELTIER EFFECT; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING SILICON; THERMODYNAMIC STABILITY; THERMOELECTRIC REFRIGERATION; THERMOELECTRICITY;

ON CHIP COOLING; PELTIER DEVICES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0034250283     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00417-9     Document Type: Article

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