Opportunities for microtechnology in metrology

IEEE Instrumentation and Measurement Magazine

Volumn 4, Issue 3, 2001, Pages 24-29

  Wijngaards, Davey ^a   Wolffenbuttel, Reinoud F ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CLEAN ROOMS; ETCHING; INTEGRATED CIRCUIT MANUFACTURE; JOSEPHSON JUNCTION DEVICES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POWER CONVERTERS; SILICON SENSORS; SILICON WAFERS; TRANSDUCERS;

MICROSYSTEMS; MICROTECHNOLOGY; MULTIJUNCTION THERMAL CONVERTER;

MICROELECTRONIC PROCESSING;

EID: 0035450602     PISSN: 10946969     EISSN: None     Source Type: Journal    
DOI: 10.1109/5289.953455     Document Type: Article

References (12)

1. Low-offset low-noise 3.5mW CMOS spinning-current hall effect sensor with integrated chopper amplifier
2. Silicon fusion bonding for fabrication of sensors actuators and microstructures
3. Nanotechnology for next-generation Josephson voltage standards
4. An integrated force-balance capacitive accelerometer for low-g application
5. Diode-based thermal RMS converter with on-chip circuitry fabricated using CMOS technology
6. Development of thin-film multijunction thermal converters in PTB/IPHT
7. Integrated voltage references and temperature sensors in CMOS technology
8. A discussion on yield modelling with defect clustering, circuit repair and circuit redundancy
9. Sensor technology strategy in silicon
10. Integrated silicon automotive accelerometer
11. Silicon IC process compatible thin metal film post-processing module
12. Design and fabrication of on-chip integrated polySiGe and polySi Peltier devices