Some aspects of blistering and exfoliation of helium-hydrogen coimplanted (100) silicon

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 186, Issue 1-4, 2002, Pages 349-354

  Corni, F ^a   Tonini, R ^a  

^a UNIVERSITY OF MODENA AND REGGIO EMILIA   (Italy)

Author keywords

Blistering; Helium; Hydrogen; Silicon ion implantation; Surface exfoliation

Indexed keywords

ANNEALING; DESORPTION; HELIUM; HYDROGEN; ION IMPLANTATION; MATHEMATICAL MODELS; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; SURFACE PHENOMENA;

BLISTERING; SURFACE EXFOLIATION;

SEMICONDUCTING SILICON;

EID: 0036135504     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(01)00901-6     Document Type: Article

References (17)