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Applied Physics Letters

Volumn 78, Issue 19, 2001, Pages 2870-2872

Helium/deuterium coimplanted silicon: A thermal desorption spectrometry investigation

(5) Corni, F a Nobili, C a Tonini, R a Ottaviani, G a Tonelli, M a

a UNIVERSITY OF MODENA AND REGGIO EMILIA (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035821053 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1344568 Document Type: Article

Times cited : (14)

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