SCOPUS 정보 검색 플랫폼

Volumn 82-84, Issue , 2002, Pages 267-272

Helium bubble growth in silicon: Ripening or bubble motion and coalescence?

(5) Vishnyakov, V M a Donnelly, S E a Carter, G a Birtcher, R C a Haworth, L a

a UNIVERSITY OF SALFORD (United Kingdom)

Author keywords

Bubbles; Gettering; Growth; Helium; Implantation; Impurities; Ion; Ripening; Sil icon; Voids

Indexed keywords

ANNEALING; BUBBLE FORMATION; COALESCENCE; CRYSTAL IMPURITIES; CRYSTAL STRUCTURE; HELIUM; HIGH TEMPERATURE OPERATIONS; ION IMPLANTATION; TRANSMISSION ELECTRON MICROSCOPY;

BUBBLE GROWTH; BUBBLE MOTION; GETTERING; RIPENING; VACANCIES; VOIDS;

SEMICONDUCTING SILICON;

EID: 0036129334 PISSN: 10120394 EISSN: None Source Type: Book Series
DOI: None Document Type: Conference Paper

Times cited : (6)

References (20)

1
- 0001609123
- (2000) J. Appl. Phys. , vol.88 , Issue.7 , pp. 3795
- Myers, S.M.¹ Seibt, M.² Schoter, W.³

2
- 0034174140
- (2000) Nucl. Instrum. & Methods Phys. Res. B , vol.160 , pp. 476
- Follstaedt, D.M.¹ Myers, S.M.² Barbour, J.C.³ Petersen, G.A.⁴ Reno, J.L.⁵ Dawson, L.R.⁶ Lee, S.R.⁷

3
- 0034236071
- (2000) J. Mater. Res. , vol.15 , Issue.7 , pp. 1449
- Raineri, V.¹ Saggio, M.² Rimini, E.³

4
- 0027188987
- (1993) Mat. Res. Soc. Symp. Proc. , vol.283 , pp. 549
- Myers, S.M.¹ Bishop, D.M.² Follstaedt, D.M.³ Stein, H.J.⁴ Wampler, W.R.⁵

5
- 36449002422
- (1995) Appl. Phys. Lett. , vol.66 , Issue.10 , pp. 1231
- Wong-Leung, J.¹ Ascheron, C.E.² Petravic, M.³ Elliman, R.G.⁴ Williams, J.S.⁵

6
- 0029227420
- (1995) Mat. Res. Soc. Symp. Proc. , vol.373 , pp. 499
- Van Veen, A.¹ Schut, H.² Hakvoort, R.A.³ Federov, A.⁴ Westerduin, K.T.⁵

7
- 0000375550
- (1995) Nucl. Inst. and Meth. B , vol.96 , pp. 257
- Overwijk, M.H.F.¹ Politiek, J.² De Kruif, R.C.M.³ Zalm, P.C.⁴

8
- 0001678017
- (1995) Nucl. Instr. & Meth. B. , vol.96 , pp. 249
- Raineri, V.¹ Battaglia, A.² Rimini, E.³

9
- 0000866736
- (1996) Phys. Rev. B , vol.53 , pp. 16637
- Deweerd, W.¹ Barancira, T.² Bukshpan, S.³ Denuynck, S.⁴ Langouche, G.⁵ Milants, K.⁶ Moons, R.⁷ Verheyden, J.⁸ Pattyn, H.⁹

10
- 0031150241
- (1997) Microelectronic Eng. , vol.36 , pp. 129
- Yankov, R.A.¹ Kaschny, J.R.² Fichtner, P.F.P.³ Mucklich, A.⁴ Kreisig, U.⁵ Skopura, W.⁶

11
- 0031547863
- (1997) Nucl. Instr. & Meth. B. , vol.127-128 , pp. 301
- Petersen, G.A.¹ Myers, S.M.² Follstaedt, D.M.³

12
- 0031547752
- (1997) Nucl. Instr. & Meth. B. , vol.127-128 , pp. 307
- Deweerd, W.¹ Moons, R.² Milants, K.³ Verheyden, J.⁴ Langouche, G.⁵ Pattyn, H.⁶

13
- 0000163037
- (1993) Phys. Rev. Lett. , vol.70 , Issue.11 , pp. 1643
- Eaglesham, D.J.¹ White, A.E.² Feldman, L.C.³ Moriya, N.⁴ Jacobson, D.C.⁵

14
- 0032620597
- (1999) Appl. Phys. Lett. , vol.74 , pp. 1857
- Schiettekatte, F.¹ Wintgens, C.² Roorda, S.³

15
- 0023385402
- (1987) Nucl. Instr. & Meth. B , vol.27 , pp. 417
- Griffioen, C.C.¹ Evans, J.H.² De Jong, P.C.³ Van Veen, A.⁴

16
- 0023433946
- (1987) Nucl. Instr. & Meth. B , vol.28 , pp. 360
- Evans, J.H.¹ Van Veen, A.² Griffioen, C.C.³

17
- 0032620597
- (1999) Appl. Phys. Lett. , vol.74 , pp. 1857
- Schiettekatte, F.¹ Wintgens, C.² Roorda, S.³

18
- 0030898543
- (1997) Microscopy Res. and Tech. , vol.36 , pp. 372
- McCaffrey, J.P.¹

19
- 0003403091
- (CRC Press LLC, Boca Raton, USA)
- (1999) The Image Processing Handbook
- Russ, J.C.¹

20
- 0000426691
- (1999) J. Appl. Phys. , vol.85 , pp. 1401
- Corni, F.¹ Calzolari, G.² Frabboni, S.³ Nobili, C.⁴ Ottaviani, G.⁵ Tonini, R.⁶ Cerefolini, G.F.⁷ Leone, D.⁸ Servidori, M.⁹ Brusa, R.S.¹⁰ Karwasz, G.P.¹¹ Tiengo, N.¹² Zecca, A.¹³

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.