Trapping of ion-implanted 57Co to cavities in c-Si: A qualitative study

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 127-128, Issue , 1997, Pages 307-310

  Deweerd, W ^a   Moons, R ^a   Milants, K ^a   Verheyden, J ^a   Langouche, G ^a   Pattyn, H ^a  

^a KU LEUVEN   (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COBALT; COMPOSITION EFFECTS; CRYSTALLINE MATERIALS; DISSOLUTION; ION IMPLANTATION; MOSSBAUER SPECTROSCOPY; NANOSTRUCTURED MATERIALS; PRECIPITATION (CHEMICAL); THERMAL EFFECTS;

CAVITY TRAPPING; NANOSIZED CAVITIES;

SEMICONDUCTING SILICON;

EID: 0031547752     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(96)00945-7     Document Type: Article

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