Application of the small-angle cleavage technique to thickness measurement of TEM samples

Microscopy Research and Technique

Volumn 36, Issue 5, 1997, Pages 372-377

  Mccaffrey, J P ^a  

^a NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

cleavage planes; cleaving; TEM specimen preparation; transmission electron microscopy

Indexed keywords

GALLIUM ARSENIDE; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; III-V SEMICONDUCTORS; IMAGE SEGMENTATION; SEMICONDUCTOR QUANTUM WELLS; SINGLE CRYSTALS; SPECIMEN PREPARATION;

CLEAVAGE PLANE; CLEAVING; DYNAMICAL THEORY; MEASUREMENTS OF; MODEL TRANSMISSION; REGION-OF-INTEREST; REGIONS OF INTEREST; SAMPLE THICKNESS; TRANSMISSION ELECTRON MICROSCOPY IMAGES; TRANSMISSION ELECTRON MICROSCOPY SPECIMEN PREPARATION;

THICKNESS MEASUREMENT;

CONFERENCE PAPER; LABORATORY TEST; PRIORITY JOURNAL; SAMPLE; THICKNESS; TISSUE SECTION; TRANSMISSION ELECTRON MICROSCOPY;

EID: 0030898543     PISSN: 1059910X     EISSN: None     Source Type: Journal    
DOI: 10.1002/(SICI)1097-0029(19970301)36:5<372::AID-JEMT5>3.0.CO;2-N     Document Type: Conference Paper

References (9)

1. Gilman, J.J. (1959) Cleavage, Ductility, and Tenacity in Crystals. In: Fracture. B.L. Averbach, et al., eds. MIT Press, Boston, p. 193-224.
2. Harkins, W. (1942) Energy relations of the surface of solids. J. Chem. Phys., 10:268-274.
3. Jaccodine, R.J. (1963) Surface energy of germanium and silicon. J. Electrochem. Soc., 110:524-527.
4. Mayer, J.W., and Lau, S.S. (1990) Electronic Materials Science: For Integrated Circuits in Si and GaAs. Macmillan, New York, pp. 142-153.
5. McCaffrey, J.P. (1991) Small-angle cleavage of semiconductors for transmission electron microscopy. Ultramicroscopy, 38:149-157.
6. McCaffrey, J.P. (1993) Improved TEM samples of semiconductors prepared by a small-angle cleavage technique, Microsc. Res. Tech., 24:180-184.
7. Michot, G. (1988) Fundamentals of silicon fracture, In: Crystal Properties and Preparation, vols. 17, 18, Trans Tech Publications, Geneva: Switzerland, pp. 55-98.
8. Nassau, K. (1980) Gems Made by Man. Chilton, Radnor, PA, pp. 161-162, 295.
9. Orowan, E. (1949) Fracture and strength of solids. Rep. Progr. Phys. 12:48-54.