RF MEMS switches and applications (INVITED)

Annual Proceedings - Reliability Physics (Symposium)

Volumn , Issue , 2002, Pages 111-115

  Newman, Harvey S ^a  

^a NAVAL RESEARCH LABORATORY   (United States)

Author keywords

Microwave control components; RF MEMS; Switches

Indexed keywords

ELECTRIC LINES; FREQUENCIES; MICROWAVE CIRCUITS; PHOTOLITHOGRAPHY; SCANNING ELECTRON MICROSCOPY; SWITCHES;

MICROWAVE FREQUENCY CIRCUITS;

MICROELECTROMECHANICAL DEVICES;

EID: 0036084682     PISSN: 00999512     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (37)

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