Development of scanning microwave microscope for high-throughput characterization of combinatorial dielectric thin film

Materials Research Society Symposium - Proceedings

Volumn 700, Issue , 2002, Pages 119-124

  Okazaki, Noriaki ^a   Ahmet, Parhat ^a   Chikyow, Toyohiro ^a   Odagawa, Hiroyuki ^a   Cho, Yasuo ^a   Fukumura, Tomoteru ^a   Kawasaki, Masashi ^a   Ohtani, Makoto ^a   Koinuma, Hideomi ^a   Hasegawa, Tetsuya ^a  

^a NATIONAL INSTITUTE FOR MATERIALS SCIENCE   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

BARIUM COMPOUNDS; CAVITY RESONATORS; COMPOSITION; MICROSCOPIC EXAMINATION; MICROWAVE OSCILLATORS; MICROWAVES; PERMITTIVITY;

BARIUM STRONTIUM TITANATE; COMBINATORIAL DIELECTRIC THIN FILM; HIGH THROUGHPUT CHARACTERIZATION; MICROWAVE OSCILLATOR MODULE; SCANNING MICROWAVE MICROSCOPE;

DIELECTRIC FILMS;

EID: 0036047937     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (15)