Combinatorial synthesis and high throughput evaluation of ferroelectric/dielectric thin-film libraries for microwave applications

Applied Physics Letters

Volumn 72, Issue 17, 1998, Pages 2185-2187

  Chang, H ^a   Gao, C ^a   Takeuchi, I ^a   Yoo, Y ^a   Wang, J ^a   Schultz, P G ^a   Xiang, X D ^a   Sharma, R P ^b   Downes, M ^b   Venkatesan, T ^b  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^b Bldg 142   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000912704     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.121316     Document Type: Article

References (13)

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13. 1000 Å thick Ag electrodes were fabricated on the surface of the films using a photolithographic lift-off process. The electrodes had a gap spacing of 9 μm, a finger width of 11 μm, and a finger length of 700 μm. The capacitances were measured at 1 MHz using an HP4280AC meter.