Mechanical deflection of polysilicon microcantilever beams using nanoindentation

Chinese Journal of Mechanical Engineering (English Edition)

Volumn 13, Issue 4, 2000, Pages 251-257

  Ding, Jianning ^a   Meng, Yonggang ^a   Wen, Shizhu ^a  

^a TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

BENDING (DEFORMATION); ELASTIC MODULI; ELASTICITY; INDENTATION; PLASTIC DEFORMATION; POLYSILICON; THIN FILMS;

MICROCANTILEVER BEAMS; NANOINDENTATION;

MICROELECTROMECHANICAL DEVICES;

EID: 0034511703     PISSN: 10009345     EISSN: None     Source Type: Journal    
DOI: 10.3901/cjme.2000.04.251     Document Type: Article

References (11)