Advances in tensile testing of polysilicon thin films

American Society of Mechanical Engineers, EEP

Volumn 22, Issue , 1997, Pages 113-116

  Sharpe Jr , William N ^a   Yuan, Bin ^a   Edwards, Richard L ^a  

^a JOHNS HOPKINS UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

FRACTURE TESTING; FRACTURE TOUGHNESS; HYDROFLUORIC ACID; INTEGRATED CIRCUIT TESTING; PLASTIC FILMS; TENSILE TESTING; THIN FILMS;

POLYSILICON THIN FILMS;

MICROELECTROMECHANICAL DEVICES;

EID: 0031382335     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)