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Materials Science and Engineering: B

Volumn 87, Issue 3, 2001, Pages 244-248

Experimental determination of the rates of decomposition and cation desorption from AlN surfaces

(2) Fan, Z Y a Newman, N a

a Arizona State University (United States)

Author keywords

AlN surfaces; Rate of cation desorption; Rate of decomposition

Indexed keywords

ACTIVATION ENERGY; ALUMINUM NITRIDE; DESORPTION; EVAPORATION; ION BOMBARDMENT; KINETIC ENERGY; POSITIVE IONS; PYROLYSIS; RATE CONSTANTS;

KINETIC ENERGY PLASMAS;

THIN FILMS;

EID: 0035915296 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/S0921-5107(01)00720-6 Document Type: Article

Times cited : (34)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.