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Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 16, Issue 4, 1998, Pages 2132-2139

Kinetic energy distribution of nitrogen ions in an electron cyclotron resonance plasma

(2) Fan, Z Y a Newman, N a

a Northwestern University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0032356911 PISSN: 07342101 EISSN: None Source Type: Journal
DOI: 10.1116/1.581320 Document Type: Article

Times cited : (15)

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