Hot-wire CVD poly-silicon films for thin film devices

Materials Research Society Symposium - Proceedings

Volumn 507, Issue , 1999, Pages 879-890

  Rath, J K ^a   Tichelaar, F D ^a   Meiling, H ^a   Schropp, R E I ^a  

^a UTRECHT UNIVERSITY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; CRYSTAL GROWTH; ELECTRON TRANSITIONS; FILM GROWTH; HYDROGEN; HYDROGEN BONDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING FILMS; THIN FILM TRANSISTORS;

HOT-WIRE CHEMICAL VAPOR DEPOSITION (HWCVD);

SEMICONDUCTING SILICON;

EID: 0032655931     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (31)