Effect of hydrogen dilution on hot-wire thin-film transistors

Materials Research Society Symposium - Proceedings

Volumn 507, Issue , 1999, Pages 909-914

  Conde, J P ^a   Silva, H ^a   Chu, V ^a  

^a INSTITUTO SUPERIOR TÉCNICO   (Portugal)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS SILICON; CHEMICAL VAPOR DEPOSITION; CRYSTALLINE MATERIALS; GLOW DISCHARGES; HYDROGEN; PHASE TRANSITIONS; SEMICONDUCTING SILICON;

HOT WIRE CHEMICAL VAPOR DEPOSITION; HYDROGEN DILUTION;

THIN FILM TRANSISTORS;

EID: 0032651744     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (18)