Design and modelling of microactuators in MEMS virtual reality prototyping CAD tool

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4591, Issue , 2001, Pages 163-171

  Aumeerally, Manisah ^a   Sitte, Renate ^a  

^a GRIFFITH UNIVERSITY   (Australia)

Author keywords

Computer aided design; Micro electromechanical systems; Microactuator; Parameters

Indexed keywords

COMPUTER AIDED DESIGN; COST EFFECTIVENESS; DATABASE SYSTEMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; OPTIMIZATION; VIRTUAL REALITY;

MEMBRANE MICROPUMP;

MICROACTUATORS;

EID: 0035773414     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.449146     Document Type: Conference Paper

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