Modeling MEMS manufacturability in virtual prototyping CAD tool

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4591, Issue , 2001, Pages 125-133

  Sitte, Renate ^a  

^a GRIFFITH UNIVERSITY   (Australia)

Author keywords

CAD; Manufacturing; MEMS; Modelling

Indexed keywords

COMPUTER AIDED DESIGN; COMPUTER SIMULATION; GRAPHICAL USER INTERFACES; OPTIMIZATION; VIRTUAL REALITY;

VIRTUAL PROTOTYPING;

MICROELECTROMECHANICAL DEVICES;

EID: 0035768519     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.449141     Document Type: Conference Paper

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