Overview of microelectromechanical systems and design processes

Proceedings - Design Automation Conference

Volumn , Issue , 1997, Pages 670-673

  Tang, William C ^a  

^a CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ELECTROPLATING; ETCHING; INJECTION MOLDING; MICROMACHINING; MICROSTRUCTURE; PHOTORESISTS; SURFACES; X RAY LITHOGRAPHY;

HIGH ASPECT RATIO LITHOGRAPHY; SURFACE MICROMACHINING; WET CHEMICAL ETCHING;

MICROELECTROMECHANICAL DEVICES;

EID: 0030644804     PISSN: 0738100X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1145/266021.266316     Document Type: Conference Paper

References (17)