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Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4228, Issue , 2000, Pages 71-82

A modular approach for simulation-based optimization of MEMS

(6) Schneider, P a Huck, E a Reitz, S a Parodat, S a Schneider, A a Schwarz, P a

a FRAUNHOFER INSTITUTE FOR INTEGRATED CIRCUITS (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGORITHMS; COMPUTER SIMULATION; FINITE ELEMENT METHOD; INTERNET; JAVA PROGRAMMING LANGUAGE; OPTIMIZATION; SEMICONDUCTOR DEVICE MODELS;

HETEROGENEOUS SYSTEMS; MICROSYSTEM; MODULAR OPTIMIZATION SYSTEM;

MICROELECTROMECHANICAL DEVICES;

EID: 0034453640 PISSN: 0277786X EISSN: None Source Type: Journal
DOI: 10.1117/12.405441 Document Type: Article

Times cited : (11)

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