Thin flexible end-effector using pneumatic balloon actuator

Sensors and Actuators, A: Physical

Volumn 89, Issue 1-2, 2001, Pages 28-35

  Konishi, Satoshi ^a   Kawai, Fumie ^a   Cusin, Pierre ^a  

^a RITSUMEIKAN UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

DEGREES OF FREEDOM (MECHANICS); END EFFECTORS; FLUIDIC DEVICES; MICROMACHINING; THIN FILMS;

CILIARY MOTION; PNEUMATIC BALLOON ACTUATOR; THIN FLEXIBLE END EFFECTOR;

ACTUATORS;

EID: 0035281188     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(00)00533-1     Document Type: Article

References (4)

1. K. Suzumori, A. Koga, R. Haneda, Microfabrication of integrated FMAs using stereo lithography, in: Proceedings of the MEMS'94, pp. 136-141.
2. C. Grosjean, G.B. Lee, W. Hong, Y.C. Tai, Micro balloon actuators for aerodynamic control, in: Proceedings of the MEMS'98, pp. 166-171.
3. J. Ok, M. Chu, C.J. Kim, Pneumatically driven microcage for micro-objects in biological liquid, in: Proceedings of the MEMS'99, pp. 459-463.
4. Ataka M., Takeshima N., Omodaka A., Fujita H. Polyimide bimorph actuators for a ciliary motion system. IEEE/ASME J. MEMS. 2(4):1993;146-150.