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Volumn 4512, Issue , 2001, Pages 25-45

MEMS and NEMS based complex adaptive smart devices and systems

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ADAPTIVE SYSTEMS; CARBON NANOTUBES; CATALYSTS; CHEMICAL BONDS; CHEMICAL VAPOR DEPOSITION; GRAFT COPOLYMERS; LARGE SCALE SYSTEMS; MICROELECTROMECHANICAL DEVICES; NANOTECHNOLOGY; SENSORS; SURFACE PROPERTIES;

EID: 0035762630     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.446770     Document Type: Conference Paper
Times cited : (3)

References (24)
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  • 2
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  • 4
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    • Surface micromachining for microelectromechanical systems
    • August
    • J.M. Bustillo, R.T. Howe, and R.S. Muller, Surface micromachining for microelectromechanical systems, Proceedings of the IEEE, Vol. 86, No. 8, August 1998, pp. 1552-1574.
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    • Bustillo, J.M.1    Howe, R.T.2    Muller, R.S.3
  • 5
    • 0032141048 scopus 로고    scopus 로고
    • High-aspect-ratio micromachining via deep X-ray lithography
    • August
    • H. Guckel, High-aspect-ratio micromachining via deep X-ray lithography, Procceedings of the IEEE, Vol. 86, No. 8, August 1998, pp. 1586-1593.
    • (1998) Procceedings of the IEEE , vol.86 , Issue.8 , pp. 1586-1593
    • Guckel, H.1
  • 6
    • 0342819025 scopus 로고
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  • 20
    • 11644302460 scopus 로고    scopus 로고
    • A. Chambers, C. Park, R.T.K. Baker, N.M. Rodriguez, Journal of Physical Chemistry B, 102 [22], 4253-4256, 1998. Heben, Nature, 386, 377-379, 1997.
    • (1997) Nature , vol.386 , pp. 377-379
    • Heben1
  • 21
    • 0032689741 scopus 로고    scopus 로고
    • Microconcentrator with opto-sense microreactor for biochemical IC chip family
    • K. Ikuta, S. Maruo, T. Fujiswa and A. Yamada, "Microconcentrator with opto-sense microreactor for biochemical IC chip family," Proc. IEEE MEMS, 376-381, 1999.
    • (1999) Proc. IEEE MEMS , pp. 376-381
    • Ikuta, K.1    Maruo, S.2    Fujiswa, T.3    Yamada, A.4
  • 23
    • 0033708593 scopus 로고    scopus 로고
    • An integrated microelectrophoretic chip fabricated using a new stereolithographic process
    • Y. Mizukami, D. Rajniak and N. Nishimura, "An integrated microelectrophoretic chip fabricated using a new stereolithographic process," Proc. IEEE MEMS, 751-756, 2000.
    • (2000) Proc. IEEE MEMS , pp. 751-756
    • Mizukami, Y.1    Rajniak, D.2    Nishimura, N.3
  • 24
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    • Fluid drive chips containing multiple pumps and switching valves for biochemcial IC family
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    • Ikuta, K.1    Hasegawa, T.2    Adachi, T.3    Maruo, S.4


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.