SiC thin film characterization and stress measurements for high temperature sensors applications

Materials Research Society Symposium - Proceedings

Volumn 546, Issue , 1999, Pages 91-96

  Gourbeyre, C ^a   Aboughe nze, P ^a,b   Malhaire, C ^a   Le Berre, M ^b   Monteil, Y ^a   Barbier, D ^a  

^a UNIVERSITÉ DE LYON   (France)

^b UNIVERSITÉ CLAUDE BERNARD LYON 1   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; SEMICONDUCTING SILICON; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR GROWTH; SENSORS; SILICON CARBIDE; STRESS ANALYSIS; SUBSTRATES; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

HIGH TEMPERATURE SENSORS;

SEMICONDUCTING FILMS;

EID: 0033324416     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (14)

1. J. von. Berg, R. Ziermann, W. Reichert, E. Obermeier, M. Eickhoff, G. Krötz, U. Thoma, T. Boltshauser, C. Cavalloni, J.P. Nendza, Mater. Sci. Forum Vols. 264-268, p1001-1004 (1998)
2. J. Shor, D. Golsdtein, A. D. Kurtz, IEEE Trans. Electron. Dev., Vol 40, p!093-1099 (1993)
3. O. Kordina, L.-O. Bjôketun, A. Henry, C. Hallin, R. C. Glass, L. Hultman, J. E. Sundgren, E. Janzen, J. Crystal Growth 154, p 303 (1995)
4. S. Veprek, Th. Kunstmann, D. Volm, B. K. Meyer, J. Vac. Sci. Technol. A15, p.10 (1997)
5. G. Ferro, H. Vincent, Y. Monteil, D. Chaussende and J. Bouix, Mater. Sci. Forum, Vols. 264-268, p 227-230 (1998)
6. D. H. Lee, J. D. Joannopoulos, Phys. Rev. Lett., 48 (26), p1842-1849 (1982)
7. Z. Li, R. C. Bradt, J. Mat. Sci., 21 p 4366-4368 (1986)
8. C. Malhaire, Y. Guyot, M. le Berre, B. Champagnon, A. Sibaï, D. Barbier, Mater. Res. Soc. Symp. 44, p. 179-184, (1997)
9. C. Malhaire, Thèse de Doctorat, INSA Lyon, 1998,202p.
10. J. von Berg et al., HiTEC, June 9-14,1996, Albuquerque, NM, USA, p.51-57
11. Y. Guyot, C. Malhaire, M. Le Berre, B. Champagnon, A.Sibaï, E.Bustarret, D.Barbier, Mat. Sci. And Eng., B46, p24-28 (1997)
12. D. Maier-Schneider, J. Maibach, E. Obermeier, J. of Microelectromechanical Syst., 4, p. 238-241 (1995).
13. C. M. Su, A. Fekade, M. Spencer, M. Wuttig, J. Appl. Phys., 77, p. 1280-1283 (1995)
14. L. Tong, M. Mehregany, L. G. Malus, Appl. Phys. Lett., 60, p. 2992-2994 (1992)