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Materials Research Society Symposium - Proceedings

Volumn 664, Issue , 2001, Pages

Ex situ and in situ defect density measurements of a-Si:H by means of the cavity ring down absorption technique

(3) Smets, A H M a Van Helden, J H a Van de Sanden, M C M a

a EINDHOVEN UNIVERSITY OF TECHNOLOGY (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL DEFECTS; DEPOSITION; FILM GROWTH; PHOTOCONDUCTIVITY; SURFACE ROUGHNESS;

DUAL BEAM PHOTOCONDUCTIVITY (DBP); SURFACE DEFECTS;

SEMICONDUCTING FILMS;

EID: 0035560347 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-664-a22.4 Document Type: Conference Paper

Times cited : (6)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.