SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Journal of Applied Physics

Volumn 71, Issue 10, 1992, Pages 4727-4738

Plasma chemistry in silane/germane and disilane/germane mixtures

(3) Doyle, J R a Doughty, D A a Gallagher, Alan a

a UNIVERSITY OF COLORADO (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 36449007293 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.350663 Document Type: Article

Times cited : (38)

References (36)

1
- 0024779480
- (1989) J. Non-Cryst. Solids , vol.114 , pp. 453
- Wagner, S.¹ Chu, V.² Conde, J.P.³ Liu, J.Z.⁴

2
- 30244563966
- (1989) Phys. Rev. B , vol.40 , pp. 6424
- Liu, J.Z.¹ Chu, V.² Shen, D.S.³ Slobonin, D.⁴ Wagner, S.⁵

3
- 84954048446
- Solarex Semi-Annual Technical Report for 1 May 1990 to 30 October 1990, Subcontract ZM-0-19033-1, Solar Energy Research Institute, Golden, CO.

4
- 84954046261
- Photovoltaic Subcontract Program FY 1990, SERI/TP-214-4135, Solar Energy Research Institute, Golden, CO
- (1991)
- Summers, K.A.¹

5
- 3943055851
- (1989) Jpn. J. Appl. Phys. , vol.28 , pp. 5
- Perrin, J.¹ Takeda, Y.² Hirano, N.³ Matsuusa, H.⁴ Matsuda, A.⁵

6
- 0004269609
- (1987) J. Appl. Phys. , vol.61 , pp. 3055
- Hata, N.¹ Matsuda, A.² Tanaka, K.³

7
- 0342404447
- (1988) Appl. Phys. Lett. , vol.52 , pp. 2022
- Perry, J.W.¹ Shing, Y.H.² Allevato, C.E.³

8
- 84954066701
- (1988) Proc. Mater. Res. Soc. , vol.118 , pp. 31
- Chatham, H.¹ Bhat, P.K.²

9
- 0000981416
- (1990) J. Appl. Phys. , vol.68 , pp. 4375
- Doyle, J.R.¹ Doughty, D.A.² Gallagher, A.³

10
- 0005989981
- (1992) J. Appl. Phys. , vol.71 , pp. 4771
- Doyle, J.R.¹ Doughty, D.A.² Gallagher, A.³

11
- 36449003577
- (1991) J. Appl. Phys. , vol.69 , pp. 4169
- Doyle, J.R.¹ Doughty, D.A.² Gallagher, A.³

12
- 0000999070
- (1985) Phys. Rev. B , vol.31 , pp. 2198
- Mackenzie, K.D.¹ Eggert, J.R.² Leopold, D.J.³ Li, Y.M.⁴ Lin, S.⁵ Paul, W.⁶

13
- 0022198129
- (1985) J. Non-Cryst. Solids , vol.77-78 , pp. 857
- Beyer, W.¹ Wagner, H.² Finger, F.³

14
- 0022735737
- (1987) Sol. Cells , vol.21 , pp. 189
- Tsu, R.¹ Menna, P.² Mahan, A.H.³

15
- 0021393291
- (1984) Appl. Phys. Lett. , vol.44 , pp. 634
- Weisz, S.Z.¹ Gomez, M.² Muir, J.A.³ Resto, O.⁴ Perez, R.⁵ Goldstein, Y.⁶ Abeles, B.⁷

16
- 36549092854
- (1990) J. Appl. Phys. , vol.67 , pp. 139
- Doughty, D.A.¹ Gallagher, A.²

17
- 0001040588
- (1990) Phys. Rev. A , vol.42 , pp. 6166
- Doughty, D.A.¹ Gallagher, A.²

18
- 0000628694
- (1987) J. Appl. Phys. , vol.62 , pp. 2803
- Kushner, M.J.¹

19
- 0006546275
- (1990) J. Chem. Phys. , vol.92 , pp. 1865
- Ruscic, B.¹ Schwarz, M.² Berkowitz, J.³

20
- 4243468744
- (1987) J. Chem. Phys. , vol.86 , pp. 1235
- Berkowitz, J.¹ Greene, J.P.² Cho, H.³ Ruscic, B.⁴

21
- 0001132517
- (1985) J. Appl. Phys. , vol.57 , pp. 5499
- Longeway, P.A.¹ Weakliem, H.A.² Estes, R.D.³

22
- 0000104966
- (1979) J. Am. Chem. Soc. , vol.101 , pp. 110
- Perkins, G.G.A.¹ Austin, E.R.² Lampe, F.W.³

23
- 0024108086
- (1988) Jpn. J. Appl. Phys. , vol.27 , pp. 2041
- Perrin, J.¹ Roca-Cabarrocas, P.² Allain, B.³ Friedt, J.M.⁴

24
- 84954057836
- (1985) J. Phys. Chem. , vol.89 , pp. 344
- Zhu, P.¹ Piserchio, M.² Lampe, F.W.³

25
- 57649131349
- (1990) Mater. Res. Soc. Symp. Proc. , vol.165 , pp. 41
- Jasinski, J.M.¹

26
- 84950748786
- (1977) J. Phys. Chem. , vol.81 , pp. 1136
- Austin, E.R.¹ Lampe, F.W.²

27
- 0011888786
- (1973) J. Am. Chem. Soc. , vol.95 , pp. 6567
- Gaspar, P.P.¹ Frost, J.J.²

28
- 36549096496
- (1985) J. Chem. Phys. , vol.82 , pp. 2909
- Dillon, M.A.¹ Wang, R.G.² Wang, Z.W.³ Spence, D.⁴

29
- 84954067002
- (private communication)
- Phelps, A.V.¹

30
- 84954050857
- (1988) J. Chem. Phys. , vol.88 , pp. 6320
- Dillon, M.A.¹ Spence, D.² Boesten, L.³ Tanaka, H.⁴

31
- 84954043524
- Energy Conversion Devices Final Report, 1 March 1987 to 28 February 1990, Report TP-211-3918 for Subcontract DE90000364, Solar Energy Research Institute, Golden, CO.

32
- 0348080349
- (1990) J. Appl. Phys. , vol.67 , pp. 7430
- Turner, W.A.¹ Jones, S.J.² Pang, D.³ Baterman, B.F.⁴ Chen, J.H.⁵ Li, Y.-M.⁶ Marques, F.C.⁷ Wetsel, A.E.⁸ Wickboldt, P.⁹ Paul, W.¹⁰ Bodait, J.¹¹ Norberg, R.E.¹² El Zawawi, I.¹³ Theye, M.L.¹⁴

33
- 0003762171
- (1986) J. Appl. Phys. , vol.60 , pp. 1369
- Gallagher, A.¹

34
- 36549101740
- (1988) J. Appl. Phys. , vol.63 , pp. 2558
- Moratz, T.J.¹

35
- 36549100753
- (1986) J. Appl. Phys. , vol.59 , pp. 1890
- Thompson, B.E.¹ Allen, K.D.² Richards, A.D.³ Sawin, H.H.⁴

36
- 36549098260
- (1988) J. Appl. Phys. , vol.64 , pp. 188
- Lin, G.H.¹ Doyle, J.R.² He, M.³ Gallagher, A.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.