Observation of dislocation etch pits in epitaxial lateral overgrowth GaN by wet chemical etching

Materials Research Society Symposium - Proceedings

Volumn 639, Issue , 2001, Pages

  Wen, T C ^a   Lee, S C ^a   Chuang, H S ^a   Chiou, C H ^a   Lee, W I ^a  

^a NATIONAL CHIAO TUNG UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; DISLOCATIONS (CRYSTALS); EPITAXIAL GROWTH; ETCHING; MIXTURES; PHOSPHORIC ACID; SCANNING ELECTRON MICROSCOPY; SULFURIC ACID; SURFACE TOPOGRAPHY;

DISLOCATION ETCH PITS; EPITAXIAL LATERAL OVERGROWTH; ETCHANT;

SEMICONDUCTING GALLIUM COMPOUNDS;

EID: 0035557608     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (13)