Evaluation of new x-ray stepper, the XRA

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 6, 2001, Pages 2448-2454

  Sumitani, Hiroaki ^a   Suita, Muneyoshi ^a   Mitsui, Soichiro ^a   Aoyama, Hajime ^a   Fujii, Kiyoshi ^a   Watanabe, Hiroshi ^a   Taguchi, Takao ^a   Matsui, Yasuji ^a  

^a ASET Super fine SR Lithography Laboratory   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

INTERFACES (MATERIALS); MASKS; SEMICONDUCTOR DEVICES; X RAY ANALYSIS;

CRITICAL DIMENSION CONTROL; X RAY STEPPER;

LITHOGRAPHY;

EID: 0035519808     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1410091     Document Type: Article

References (14)

1. H. Sumitani et al., Proc. SPIE 2723, 222 (1996).
2. H. Sumitani, M. Suita, T. Hifumi, H. Watanabe, H. Yabe, K. Itoga, S. Aya, K. Marumoto, and Y. Matsui, Microelectron. Eng, 53, 587 (2000).
3. H. Aoyama et al., J. Vac. Sci. Technol. B 18, 2961 (2000).
4. H. Watanabe, Y. Nakayama, S. Tsuboi, M. Ezaki, H. Aoyama, Y. Matsui, T. Morosawa, and M. Oda, Proc. SPIE (to be published).
5. Y. Tanaka, T. Iwamoto, K. Fujii, Y. Kikuchi, and Y. Matsui, J. Vac. Sci. Technol. B 17, 3415 (1999).
6. H. Sumitani, H. Watanabe, K. Itoga, T. Hifumi, M. Suita, N. Ogushi, N. Mizusawa, and K. Uda, Jpn. J. Appl. Phys., Part 1 36, 7591 (1997).
7. H. Aoyama, S. Mitsui, T. Taguchi, Y. Tanaka, and Y. Matsui, J. Vac. Sci. Technol. B 17, 3411 (1999).
8. N. Mizusawa, K. Uda, Y. Tanaka, H. Ohta, and Y. Watanabe, J. Vac. Sci. Technol. B 18, 2955 (2000).
9. Y. Watanabe, S. Hara, N. Mizusawa, Y. Fukuda, and S. Uzawa, J. Vac. Sci. Technol. B 15, 2503 (1997).
10. K. Sentoku and T. Matsumoto, J. Vac. Sci. Technol. B 16, 3466 (1998).
11. K. Fujii, Y. Tanaka, T. Iwamoto, S. Tsuboi, H. Sumitani, T. Taguchi, K. Suzuki, and Y. Matsui, Proc. SPIE (to be published).
12. K. Deguchi, K. Miyoshi, M. Oda, and T. Matsuda, J. Vac. Sci. Technol. B 14, 4294 (1996).
13. K. Fujii, K. Suzuki, and Y. Matsui, Jpn. J. Appl. Phys., Part 1 39, 6947 (2000).
14. T. Kitayama, K. Itoga, Y. Watanabe, and S. Uzawa, J. Vac. Sci. Technol. B 18, 2950 (2000).