Novel illumination system of synchrotron radiation stepper with full field exposure method

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 6, 1997, Pages 2503-2508

  Watanabe, Yutaka ^a   Hara, Shinichi ^a   Mizusawa, Nobutoshi ^a   Fukuda, Yasuaki ^a   Uzawa, Shunichi ^a  

^a CANON INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4143072615     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589674     Document Type: Article

References (5)

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2. H. Sumitani, K. Itoga, H. Shimano, S. Aya, H. Yabe, T. Hifumi, H. Watanabe, K. Kise, M. Inoue, K. Marumoto, Y. Nishioka, H. Abe, N. Mizusawa, K. Saitoh, Y. Fukuda, and S. Uzawa, Proc. SPIE 2723, 222 (1996).
3. N. Mizusawa, The 40th Spring Meeting of The Japan Society of Applied Physics in 1993 (unpublished).
4. K. Saitoh, H. Ohsawa, K. Sentoku, T. Matsumoto, N. Mizusawa, Y. Fukuda, K. Uda, H. Sumitani, and T. Hifumi, J. Vac. Sci. Technol. B 14, 4303 (1996).
5. C. Archie, IBM J. Res. Dev. 37, 373 (1993).