Technology and performance of the Canon XRA-1000 production X-ray stepper

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 18, Issue 6, 2000, Pages 2955-2960

  Mizusawa, Nobutoshi ^a   Uda, Kouji ^a   Tanaka, Yutaka ^a   Ohta, Hirohisa ^a   Watanabe, Yutaka ^a  

^a CANON INC   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HELIUM; LIGHTING; MASKS; NANOTECHNOLOGY;

ENVIRONMENT CONTROL SYSTEMS; X RAY STEPPERS;

PHOTOLITHOGRAPHY;

EID: 0034318559     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1324619     Document Type: Article

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