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Volumn 511, Issue , 1998, Pages 33-38

Properties development during curing of low dielectric-constant spin-on glasses

Author keywords

[No Author keywords available]

Indexed keywords

CURING; ELECTRIC PROPERTIES; MECHANICAL PROPERTIES; PERMITTIVITY; SEMICONDUCTOR DEVICE MANUFACTURE; STRESS CORROSION CRACKING; TEMPERATURE; TENSILE STRESS; THERMAL EXPANSION; THIN FILMS;

EID: 0032291667     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-511-33     Document Type: Conference Paper
Times cited : (18)

References (4)
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.