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Measurement Science and Technology

Volumn 12, Issue 11, 2001, Pages 1996-2001

Spectroscopic interference microscopy technique for measurement of layer parameters

(1) Abdulhalim, I a

a UNIVERSITY OF THE WEST OF SCOTLAND (United Kingdom)

Author keywords

Interference microscopy; Multi layers; Optical metrology; Thin film optics

Indexed keywords

ELECTROMAGNETIC WAVE REFLECTION; INTERFEROMETERS; REFRACTIVE INDEX; THICKNESS MEASUREMENT;

INTERFEROGRAMS;

OPTICAL FILMS;

MEASUREMENT METHOD;

EID: 0035503935 PISSN: 09570233 EISSN: None Source Type: Journal
DOI: 10.1088/0957-0233/12/11/332 Document Type: Article

Times cited : (27)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.