Theory for double beam interference microscopes with coherence effects and verification using the linnik microscope

Journal of Modern Optics

Volumn 48, Issue 2, 2001, Pages 279-302

  Abdulhalim, I ^a,b  

^a UNIVERSITY OF THE WEST OF SCOTLAND   (United Kingdom)

^b KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ABERRATIONS; COHERENT LIGHT; DISPERSIONS; IMAGING SYSTEMS; INTERFEROMETRY; LIGHT INTERFERENCE; MICROSCOPES; OBJECT RECOGNITION; OPTICAL BEAM SPLITTERS; OPTICAL GLASS; OPTICAL INSTRUMENT LENSES; THEOREM PROVING;

CHROMATIC ABERRATIONS; COHERENCE EFFECTS; DOUBLE BEAM INTERFERENCE MICROSCOPES; GLASS DISPERSIONS; INTERFEROGRAM; LINNIK MICROSCOPE; SPATIAL COHERENCE; TEMPORAL COHERENCE;

OPTICAL MICROSCOPY;

EID: 0035866464     PISSN: 09500340     EISSN: 13623044     Source Type: Journal    
DOI: 10.1080/09500340108232458     Document Type: Article

References (23)

1. Krug, W., Rienitz, J., and Schultz, G., 1964. Contributions to Interference Microscopy, London:Hilger and Watts.
2. Wilson, T., and Shippard, C. J. R., 1984. Theory and Practice of Scanning Optical Microscopy, London:Academic.
3. Gu, M., 1996. Principles of Three Dimensional Imaging in Confocal Microscopes, Singapore:World Scientific.
4. Davidson, M., Kaufman, K., Mazor, I., and Cohen, F., 1987. “ Integrated Circuits Metrology, Inspection, and Process Control ”. In Proc. SPIE Edited by:Monahan, K. M., Vol. 775, 2333
5. Davidson, M., Kaufman, K., and Mazor, I., 1988. Proc. Soc. Photo-Opt. Instrum. Eng., 921:100
6. Kino, G. S., and Chim, S. S. C., 1990. Appl. Optics, 29:3775
7. Schultz, G., 1964. Contributions to Interference Microscopy, Edited by:Krug, W., Rienitz, J., and Schultz, G., 308–308. London:Hilger and Watts.
8. Ingelstam, E., and Johansson, L. P., 1958. J. Sci. Instrum., 35:15
9. Schultz, G., and Elssner, K. E., 1991. Appl. Optics, 30:4500
10. Gates, J. W., 1956. J. Sci. Instrum., 33:507
11. Bruce, C. F., and Thornton, B. S., 1957. J. Sci. Instrum., 34:203
12. Tolmon, F. R., and Wood, J. G., 1956. J. Sci. Instrum., 33:236
13. Mykura, H., and Rhead, G. E., 1963. J. Sci. Instrum., 40:313
14. Dowell, M. B., Hultman, C. A., and Rosenblatt, G. M., 1997. Rev. Sci. Instrum., 48:1491
15. Biegen, J. F., 1989. Appl. Optics, 28:1972
16. Creath, K., 1989. Appl. Optics, 28:3333
17. Sheppard, C. J. R., and Larkin, K. G., 1995. Appl. Optics, 34:4731
18. Gale, D. M., Pether, M. I., and Dainty, J. C., 1996. App. Optics, 35:131
19. Creath, K., 1988. Progress in Optics XXVI, Edited by:Wolf, E., New York:Elsevier. Chap. 5.
20. Hopkins, H. H., 1957. J. opt. Soc. Am., 47:508
21. Born, M., and Wolf, E., 1970. Principles of Optics, 4th edition New York:Pergamon.
22. Goodman, J. W., 1968. Introduction to Fourier Optics, New York:McGraw-Hill. Chap. 5.
23. Wolfram, S., 1991. Mathematica-A System for doing Mathematics by Computer, 3rd edition Reading, MA:Addison-Wesley.