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Optik (Jena)
Volumn 110, Issue 10, 1999, Pages 476-478
Method for the measurement of multi-layers refractive indices and thicknesses using interference microscopes with annular aperture
Author keywords

[No Author keywords available]
Indexed keywords

LENSES; LIGHT ABSORPTION; LIGHT INTERFERENCE; OPTICAL MICROSCOPY; OPTICAL VARIABLES MEASUREMENT; REFRACTIVE INDEX; THICKNESS MEASUREMENT;
EID: 0033300566     PISSN: 00304026     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article
Times cited : (16)
References (13)
  • 4
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    • Davidson M, Kaufman K, Mazor I: First results of a product using coherence probe imaging for wafer inspection. Proc. Soc. Photo-Opt. Instrum. Eng. 921 (1988) 100-114
    • (1988) Proc. Soc. Photo-Opt. Instrum. Eng. , vol.921 , pp. 100-114
    • Davidson, M.1    Kaufman, K.2    Mazor, I.3
  • 5
    • 84955326631 scopus 로고
    • Mirau correlation microscope
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    • (1990) Appl. Opt. , vol.29 , pp. 3775-3783
    • Kino, G.S.1    Chim, S.S.C.2
  • 6
    • 0001606237 scopus 로고    scopus 로고
    • Linnik microscope imaging of integrated circuit structures
    • Gale DM, Pether MI, Dainty JC: Linnik microscope imaging of integrated circuit structures. Appl. Opt. 35 (1996) 131-148
    • (1996) Appl. Opt. , vol.35 , pp. 131-148
    • Gale, D.M.1    Pether, M.I.2    Dainty, J.C.3
  • 7
    • 0015487094 scopus 로고
    • Refractive index measurement by interference microscopy: Corrections for dispersion
    • Ross WD: Refractive Index Measurement by Interference Microscopy: Corrections for Dispersion. Appl. Opt. 11 (1972) 1916-1918
    • (1972) Appl. Opt. , vol.11 , pp. 1916-1918
    • Ross, W.D.1
  • 9
    • 84975647302 scopus 로고
    • High resolution measurement of multilayer structures
    • Merklein TM: High resolution measurement of multilayer structures. Appl. Opt. 29 (1990) 505-511
    • (1990) Appl. Opt. , vol.29 , pp. 505-511
    • Merklein, T.M.1
  • 10
    • 0001912395 scopus 로고
    • Refractive index and axial distance measurements in 3-D microscopy
    • Visser TD, Oud JL, Bakenhoff GJ: Refractive index and axial distance measurements in 3-D microscopy. Optik 90 (1992) 17-19
    • (1992) Optik , vol.90 , pp. 17-19
    • Visser, T.D.1    Oud, J.L.2    Bakenhoff, G.J.3
  • 11
    • 0030381669 scopus 로고    scopus 로고
    • Simultaneous measurement of thicknesses and refractive indices of multiple layers by a low-coherence confocal interference microscopy
    • Fukano T, Yamaguchi I: Simultaneous measurement of thicknesses and refractive indices of multiple layers by a low-coherence confocal interference microscopy. Opt. Lett. 21 (1996) 1942-1944
    • (1996) Opt. Lett. , vol.21 , pp. 1942-1944
    • Fukano, T.1    Yamaguchi, I.2
  • 12
    • 0342545734 scopus 로고    scopus 로고
    • Theory for double beam interference microscopes with coherence effects and verification using the linnik microscope
    • Abdulhalim I: Theory for Double Beam Interference Microscopes with Coherence Effects and Verification using the Linnik Microscope. To appear in the Journal of Modern Optics 1999
    • (1999) Journal of Modern Optics
    • Abdulhalim, I.1
  • 13
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    • Phase measurement interferometry techniques
    • Wolf E (ed.): Elsevier, New York Ch. 5
    • Creath K: Phase measurement interferometry techniques. In Wolf E (ed.): Progress in Optics XXVI. Elsevier, New York 1988, Ch. 5
    • (1988) Progress in Optics XXVI
    • Creath, K.1

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.