X-ray photoelectron spectroscopy studies of modified surfaces of α-Al2O3, SiO2, and Si3N4 by low energy reactive ion beam irradiation

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 17, Issue 6, 1999, Pages 3362-3367

  Choi, Won Kook ^a   Koh, Seok Keun ^a   Jung, Hyung Jin ^a  

^a Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001035653     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.582067     Document Type: Article

References (19)

1. D. Marton, K. J. Boyd, T. Lyte, and J. W. Rabalais, Phys. Rev. 48, 6757 (1993).
2. H. J. Stelffen, D. Marton, and J. W. Rabalais, Phys. Rev. Lett. 68, 1726 (1992).
3. P. Reinke, G. Francz, P. Oelhafen, and J. Ullmann, Phys. Rev. B 54, 7067 (1996).
4. G. M. Shedd and P. E. Russell, J. Vac. Sci. Technol. A 9, 1261 (1991).
5. J. A. Taylor, G. M. Lancaster, A. Ignatiev, and J. W. Rabalais, J. Chem. Phys. 68, 1776 (1978).
6. K. H. Park, B. C. Kim, and H. Kang, J. Chem. Phys. 97, 2742 (1992).
7. S. Hasegawa and P. C. Zalm, J. Appl. Phys. 58, 2539 (1985).
8. R. Hezel and N. Lieske, J. Electrochem. Soc. 129, 379 (1982).
9. Y. Baba, T. A. Sasaki, and I. Takano, J. Vac. Sci. Technol. A 6, 2945 (1988).
10. Y.-C. Kim, C.-J. Yu, and D. N. Seidman, J. Appl. Phys. 81, 944 (1997).
11. A. Hoffman, I. Gouzman, and R. Brener, Appl. Phys. Lett. 64, 845 (1994)
12. I. Gouzman, R. Brener, and A. Hoffman, Surf. Sci. 331-333, 283 (1995).
13. W. K. Choi, S. C. Choi, H.-J. Jung, and S. K. Koh, Nucl. Instrum. Methods Phys. Res. B 148, 740 (1999).
14. S. K. Koh, Y.-B. Son, J.-S. Gam, C.-J. Kim, W. K. Choi, and H.-J. Jung, J. Mater. Res. 13, 2560 (1998).
15. W. K. Choi, H.-J. Jung, S. K. Koh, D. Byun, and D.-W. Kum, J. Vac. Sci. Technol. A 16, 3311 (1998).
16. A. D. Katnani and K. I. Papathomas, J. Vac. Sci. Technol. A 5, 1335 (1987).
17. H. Amano, N. Sawaki, I. Akassaki, and Y. Toyoda, Appl. Phys. Lett. 48, 353 (1986).
18. A. Nakamura, M. Senoh, N. Iwasa, and S. Nagahama, Jpn. J. Appl. Phys., Part 2 34, L797 (1995).
19. J. A. Taylor, G. M. Lancaster, A. Ignaitiev, and J. W. Rabalais, J. Chem. Phys. 68, 1776 (1978).