Lateral profiling of impurity surface concentration in submicron metal-oxide-silicon transistors

Journal of Applied Physics

Volumn 90, Issue 7, 2001, Pages 3539-3550

  Wang, Yih ^a   Sah, Chih Tang ^a  

^a University of Florida   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035476926     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1396825     Document Type: Article

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