메뉴 건너뛰기




Volumn 17, Issue 2, 1996, Pages 72-74

Profiling interface traps in MOS transistors by the DC current-voltage method

Author keywords

[No Author keywords available]

Indexed keywords

CURRENT DENSITY; CURRENT VOLTAGE CHARACTERISTICS; ELECTRIC SPACE CHARGE; INTERFACES (MATERIALS); SEMICONDUCTOR JUNCTIONS; TRANSISTORS;

EID: 0030086978     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.484127     Document Type: Article
Times cited : (22)

References (30)
  • 1
    • 0023292235 scopus 로고
    • Two-dimensional modeling of locally damaged short-channel MOSFET's operating in the linear region
    • Feb.
    • H. Haddara and S. Cristoloveanu, "Two-dimensional modeling of locally damaged short-channel MOSFET's operating in the linear region," IEEE Trans. Electron Devices, vol. ED-34, no. 2, pp. 378-385, Feb. 1987.
    • (1987) IEEE Trans. Electron Devices , vol.ED-34 , Issue.2 , pp. 378-385
    • Haddara, H.1    Cristoloveanu, S.2
  • 2
    • 0023564219 scopus 로고
    • The relationship between oxide charge and device degradation: A comparative study of n- and p-channel MOSFET's
    • Dec.
    • Andreas Schwerin, Wilfried Hansch, and Werner Weber, "The relationship between oxide charge and device degradation: A comparative study of n- and p-channel MOSFET's," IEEE Trans. Electron Devices, vol. ED-24, no. 12, pp. 2493-2500, Dec. 1987.
    • (1987) IEEE Trans. Electron Devices , vol.ED-24 , Issue.12 , pp. 2493-2500
    • Schwerin, A.1    Hansch, W.2    Weber, W.3
  • 3
    • 0025388736 scopus 로고
    • Hot-carrier-induced deep-level defects from gated-diode measurement on MOSFET's
    • Feb.
    • P. Speckbacher, A. Asenov, M. Bollu, F. Koch, and W. Weber, "Hot-carrier-induced deep-level defects from gated-diode measurement on MOSFET's," IEEE Electron Device Lett., vol. 11, no. 2, pp. 95-97, Feb. 1990; "The gated-diode configuration in MOSFET's, a sensitive tool for characterizing hot-carrier degradation," IEEE Trans. Electron Devices, vol. 42, no. 7, pp. 1287-1296, July 1995.
    • (1990) IEEE Electron Device Lett. , vol.11 , Issue.2 , pp. 95-97
    • Speckbacher, P.1    Asenov, A.2    Bollu, M.3    Koch, F.4    Weber, W.5
  • 4
    • 0029344984 scopus 로고
    • The gated-diode configuration in MOSFET's, a sensitive tool for characterizing hot-carrier degradation
    • July
    • P. Speckbacher, A. Asenov, M. Bollu, F. Koch, and W. Weber, "Hot-carrier-induced deep-level defects from gated-diode measurement on MOSFET's," IEEE Electron Device Lett., vol. 11, no. 2, pp. 95-97, Feb. 1990; "The gated-diode configuration in MOSFET's, a sensitive tool for characterizing hot-carrier degradation," IEEE Trans. Electron Devices, vol. 42, no. 7, pp. 1287-1296, July 1995.
    • (1995) IEEE Trans. Electron Devices , vol.42 , Issue.7 , pp. 1287-1296
  • 5
    • 84918052986 scopus 로고
    • Effects of surface recombination and channel on p-n junction and transistor characteristics
    • Jan.
    • (a) C.-T. Sah, "Effects of surface recombination and channel on p-n junction and transistor characteristics," IRE Trans. Electron Devices, vol. ED-9, no. 1, pp. 94-108, Jan. 1962;
    • (1962) IRE Trans. Electron Devices , vol.ED-9 , Issue.1 , pp. 94-108
    • Sah, C.-T.1
  • 6
    • 84937647715 scopus 로고
    • A new semiconductor tetrode, the surface potential controlled transistor
    • Nov.
    • (b) "A new semiconductor tetrode, the surface potential controlled transistor," Proc. IRE, vol. 49, no. 11, pp. 1623-1634, Nov. 1961. These papers demonstrated forward-biased recombination current in the gated BJT emitter-base diode junction but also its reverse-biased generation current which is exactly the data obtained by authors in [3].
    • (1961) Proc. IRE , vol.49 , Issue.11 , pp. 1623-1634
  • 7
    • 45249107721 scopus 로고
    • Charge pumping in MOS devices
    • Mar.
    • J. Stephen Brugler and Paul G. A. Jespers, "Charge pumping in MOS devices," IEEE Trans. Electron Devices, vol. ED-16, no. 3, pp. 297-302, Mar. 1969.
    • (1969) IEEE Trans. Electron Devices , vol.ED-16 , Issue.3 , pp. 297-302
    • Brugler, J.S.1    Jespers, P.G.A.2
  • 8
    • 3843087307 scopus 로고
    • Measurement of germanium surface states by pulsed channel effect
    • July 1
    • G. Rupprecht, "Measurement of germanium surface states by pulsed channel effect," Phys. Rev., vol. 111, no. 1, pp. 75-81, July 1, 1958; J. Phys. Chem. Solids, "Cross sections of midgap surface states in silicon by pulsed field effect experiment," vol. 14, pp. 208-213, 1960.
    • (1958) Phys. Rev. , vol.111 , Issue.1 , pp. 75-81
    • Rupprecht, G.1
  • 9
    • 3843129635 scopus 로고
    • Cross sections of midgap surface states in silicon by pulsed field effect experiment
    • G. Rupprecht, "Measurement of germanium surface states by pulsed channel effect," Phys. Rev., vol. 111, no. 1, pp. 75-81, July 1, 1958; J. Phys. Chem. Solids, "Cross sections of midgap surface states in silicon by pulsed field effect experiment," vol. 14, pp. 208-213, 1960.
    • (1960) J. Phys. Chem. Solids , vol.14 , pp. 208-213
  • 10
    • 84951262372 scopus 로고
    • Deep trap levels in silicon p-n junctions
    • S. Sato, S. Kawaji, and A. Kobayashi, "Deep trap levels in silicon p-n junctions," Jpn. J. Appl. Phys., vol. 3, pp. 496-497, 1964; "Surface states on cleaved silicon surfaces," Surface Science, vol. 3, pp. 98-100, 1964; "Electrical properties of carrier generation-recombination centers in silicon p-n junctions," J. Appl. Phys. 36, no. 12, pp. 3779-3783, December 1965; and "Electrical properties of surface states on silicon surfaces," Surface Science, vol. 4, pp. 299-312, 1966.
    • (1964) Jpn. J. Appl. Phys. , vol.3 , pp. 496-497
    • Sato, S.1    Kawaji, S.2    Kobayashi, A.3
  • 11
    • 50549218764 scopus 로고
    • Surface states on cleaved silicon surfaces
    • S. Sato, S. Kawaji, and A. Kobayashi, "Deep trap levels in silicon p-n junctions," Jpn. J. Appl. Phys., vol. 3, pp. 496-497, 1964; "Surface states on cleaved silicon surfaces," Surface Science, vol. 3, pp. 98-100, 1964; "Electrical properties of carrier generation-recombination centers in silicon p-n junctions," J. Appl. Phys. 36, no. 12, pp. 3779-3783, December 1965; and "Electrical properties of surface states on silicon surfaces," Surface Science, vol. 4, pp. 299-312, 1966.
    • (1964) Surface Science , vol.3 , pp. 98-100
  • 12
    • 3843142778 scopus 로고
    • Electrical properties of carrier generation-recombination centers in silicon p-n junctions
    • December
    • S. Sato, S. Kawaji, and A. Kobayashi, "Deep trap levels in silicon p-n junctions," Jpn. J. Appl. Phys., vol. 3, pp. 496-497, 1964; "Surface states on cleaved silicon surfaces," Surface Science, vol. 3, pp. 98-100, 1964; "Electrical properties of carrier generation-recombination centers in silicon p-n junctions," J. Appl. Phys. 36, no. 12, pp. 3779-3783, December 1965; and "Electrical properties of surface states on silicon surfaces," Surface Science, vol. 4, pp. 299-312, 1966.
    • (1965) J. Appl. Phys. , vol.36 , Issue.12 , pp. 3779-3783
  • 13
    • 3843055714 scopus 로고
    • Electrical properties of surface states on silicon surfaces
    • S. Sato, S. Kawaji, and A. Kobayashi, "Deep trap levels in silicon p-n junctions," Jpn. J. Appl. Phys., vol. 3, pp. 496-497, 1964; "Surface states on cleaved silicon surfaces," Surface Science, vol. 3, pp. 98-100, 1964; "Electrical properties of carrier generation-recombination centers in silicon p-n junctions," J. Appl. Phys. 36, no. 12, pp. 3779-3783, December 1965; and "Electrical properties of surface states on silicon surfaces," Surface Science, vol. 4, pp. 299-312, 1966.
    • (1966) Surface Science , vol.4 , pp. 299-312
  • 14
    • 0014838353 scopus 로고
    • Measurements of the thermal-emission rates of electrons and holes at the gold centers in silicon using the small-signal pulsed field effect
    • Sept.
    • S. Sato and C. T. Sah, "Measurements of the thermal-emission rates of electrons and holes at the gold centers in silicon using the small-signal pulsed field effect," J. Appl. Phys., vol. 41, no. 10, pp. 4175-4181, Sept. 1970.
    • (1970) J. Appl. Phys. , vol.41 , Issue.10 , pp. 4175-4181
    • Sato, S.1    Sah, C.T.2
  • 15
    • 0016927294 scopus 로고
    • The use of charge pumping currents to measure surface state densities in MOS transistors
    • March
    • Alexander B. M. Elliot, "The use of charge pumping currents to measure surface state densities in MOS transistors," Solid-State Electron., vol. 19, no. 3, pp. 241-247, March 1976.
    • (1976) Solid-State Electron. , vol.19 , Issue.3 , pp. 241-247
    • Elliot, A.B.M.1
  • 16
    • 0021201529 scopus 로고
    • A reliable approach to charge-pumping measurements in MOS transistors
    • Jan.
    • Guido Groeseneken, Herman E. Maes, Nicolars Beltran, and Rogel F. De Keersmaechker, "A reliable approach to charge-pumping measurements in MOS transistors," IEEE Trans. Electron Devices, vol. ED-31, no. 1, pp. 42-53, Jan. 1984. See also extensive references.
    • (1984) IEEE Trans. Electron Devices , vol.ED-31 , Issue.1 , pp. 42-53
    • Groeseneken, G.1    Maes, H.E.2    Beltran, N.3    De Keersmaechker, R.F.4
  • 17
    • 0022162761 scopus 로고
    • A general model for interface-trap charge-pumping effects in MOS devices
    • Nov.
    • U. Cilingiroglu, "A general model for interface-trap charge-pumping effects in MOS devices," Solid-State Electron., vol. 28, no. 11, pp. 1127-1141, Nov. 1985.
    • (1985) Solid-State Electron. , vol.28 , Issue.11 , pp. 1127-1141
    • Cilingiroglu, U.1
  • 18
    • 3843126455 scopus 로고
    • Profiling of stress induced interface states in soon channel MOSFET's using a composite charge pumping technique
    • Aug.
    • H. Haddara and S. Cristoloveanu, "Profiling of stress induced interface states in soon channel MOSFET's using a composite charge pumping technique," Solid-State Electron., vol. 29, no. 8, pp. 767-772, Aug. 1986.
    • (1986) Solid-State Electron. , vol.29 , Issue.8 , pp. 767-772
    • Haddara, H.1    Cristoloveanu, S.2
  • 19
    • 0022754998 scopus 로고
    • Evaluation of hot carrier degradation of n-channel MOSFETs with the charge pumping technique
    • July
    • P. Heremans, H. E. Maes, and N. Saks, "Evaluation of hot carrier degradation of n-channel MOSFETs with the charge pumping technique," IEEE Electron Device Lett., vol. EDL-7, no. 7, pp. 428-430, July 1986.
    • (1986) IEEE Electron Device Lett. , vol.EDL-7 , Issue.7 , pp. 428-430
    • Heremans, P.1    Maes, H.E.2    Saks, N.3
  • 20
    • 36549102800 scopus 로고
    • 2 interface states
    • July
    • 2 interface states," J. Appl. Phys., vol. 62, no. 2, pp. 591-599, July 1987.
    • (1987) J. Appl. Phys. , vol.62 , Issue.2 , pp. 591-599
    • Tseng, W.L.1
  • 21
    • 0024125256 scopus 로고
    • Lateral Distribution of Hot-Carrier-Induced Interface Traps in MOSFET's
    • Dec.
    • Mario G. Ancona, Nelson S. Saks, and Daniel McCarthy, "Lateral Distribution of Hot-Carrier-Induced Interface Traps in MOSFET's," IEEE Trans. Electron Devices, vol. 35, no. 12, pp. 2221-2228, Dec. 1988.
    • (1988) IEEE Trans. Electron Devices , vol.35 , Issue.12 , pp. 2221-2228
    • Ancona, M.G.1    Saks, N.S.2    McCarthy, D.3
  • 22
    • 0001576578 scopus 로고
    • A time domain analysis of the charge pumping current
    • Nov.
    • Gerard Ghibaudo and Nelson S. Saks, "A time domain analysis of the charge pumping current," J. Appl. Phys., vol., 64, no. 9, pp. 4751-4754, Nov. 1988.
    • (1988) J. Appl. Phys. , vol.64 , Issue.9 , pp. 4751-4754
    • Ghibaudo, G.1    Saks, N.S.2
  • 23
    • 36549103660 scopus 로고
    • A simple technique for determining the interface-trap distribution of submicron metal-oxide-semiconductor transistors by the charge pumping method
    • Feb.
    • F. Hoffman and W. H. Krautschneider, "A simple technique for determining the interface-trap distribution of submicron metal-oxide-semiconductor transistors by the charge pumping method," J. Appl. Phys., vol. 65, no. 3, pp. 1358-1360, Feb. 1989.
    • (1989) J. Appl. Phys. , vol.65 , Issue.3 , pp. 1358-1360
    • Hoffman, F.1    Krautschneider, W.H.2
  • 24
    • 0011522080 scopus 로고
    • The charge pumping method: Experiment and complete simulation
    • Oct.
    • F. Hofmann and W. Hansch, "The charge pumping method: Experiment and complete simulation," J. Appl. Phys., vol. 66, no. 7, pp. 3092-3096, Oct. 1989.
    • (1989) J. Appl. Phys. , vol.66 , Issue.7 , pp. 3092-3096
    • Hofmann, F.1    Hansch, W.2
  • 25
    • 0024705114 scopus 로고
    • Analysis of the charge pumping technique and its applications for the evaluation of MOSFET degradation
    • July
    • Paul Heremans, John Witters, Guido Groeseneken, and Herman E. Maes, "Analysis of the charge pumping technique and its applications for the evaluation of MOSFET degradation," IEEE Trans. Electron Devices, vol. 36, no. 7, pp. 1318-1335, July 1989
    • (1989) IEEE Trans. Electron Devices , vol.36 , Issue.7 , pp. 1318-1335
    • Heremans, P.1    Witters, J.2    Groeseneken, G.3    Maes, H.E.4
  • 27
    • 0026187918 scopus 로고
    • A new technique for measuring lateral distribution of oxide charge and interface traps near MOSFET junctions
    • July
    • Wenliang Chen and Tso-Ping Ma, "A new technique for measuring lateral distribution of oxide charge and interface traps near MOSFET junctions," IEEE Electron Device Letters, vol. 12, no. 7, pp. 393-395, July 1991.
    • (1991) IEEE Electron Device Letters , vol.12 , Issue.7 , pp. 393-395
    • Chen, W.1    Ma, T.-P.2
  • 28
    • 0027147283 scopus 로고
    • Lateral profiling of oxide charge and interface traps near MOSFET junction
    • Jan.
    • Wenliang Chen, Arthur Balasinski, and Tso-Ping Ma, "Lateral profiling of oxide charge and interface traps near MOSFET junction," IEEE Trans. Electron Devices, vol. 40, no. 1, pp. 187-195, Jan. 1993.
    • (1993) IEEE Trans. Electron Devices , vol.40 , Issue.1 , pp. 187-195
    • Chen, W.1    Balasinski, A.2    Ma, T.-P.3
  • 30
    • 0029731680 scopus 로고    scopus 로고
    • Separation of interface traps and areal nonuniformity by the DC Current-Voltage Method
    • SRC Publ. C95113. Jan.
    • Jack T. Kavalieros and Chih-Tang Sah "Separation of interface traps and areal nonuniformity by the DC Current-Voltage Method," SRC Publ. C95113. IEEE Trans. Electron Devices, vol. 43, no. 1, pp. 1-5, Jan. 1996.
    • (1996) IEEE Trans. Electron Devices , vol.43 , Issue.1 , pp. 1-5
    • Kavalieros, J.T.1    Sah, C.-T.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.