SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Materials Science in Semiconductor Processing

Volumn 4, Issue 5, 2001, Pages 397-403

Stress effects on defects and dopant diffusion in Si

(1) Aziz, Michael J a

a HARVARD UNIVERSITY (United States)

Author keywords

Diffusion; Dopant; Point defect; Strain; Stress

Indexed keywords

DIFFUSION IN SOLIDS; HYDROSTATIC PRESSURE; POINT DEFECTS; PRESSURE EFFECTS; SEMICONDUCTOR DOPING; SINGLE CRYSTALS; STRESS ANALYSIS; THERMODYNAMICS;

DOPANTS; STRESS EFFECTS;

SEMICONDUCTING SILICON;

EID: 0035474194 PISSN: 13698001 EISSN: None Source Type: Journal
DOI: 10.1016/S1369-8001(01)00014-2 Document Type: Review

Times cited : (34)

References (32)

1
- 33746343244
- (1989) Rev Mod Phys , vol.61 , pp. 289
- Fahey, P.M.¹ Griffin, P.B.² Plummer, J.D.³

2
- 0000755647
- (1993) Phys Rev Lett , vol.71 , pp. 883
- Moriya, N.¹ Feldman, L.C.² Luftman, H.S.³ King, C.A.⁴ Bevk, J.⁵ Freer, B.⁶

3
- 3943070349
- (1994) Phys Rev Lett , vol.73 , pp. 448
- Baumann, F.H.¹ Huang, J.-H.² Rentschler, J.A.³ Chang, T.Y.⁴ Ourmazd, A.⁵

4
- 12044253285
- (1994) Phys Rev Lett , vol.72 , pp. 2585
- Cowern, N.E.B.¹ Zalm, P.C.² Van der Sluis, P.³ Gravesteijn, D.J.⁴ De Boer, W.B.⁵

5
- 0002935798
- Proceedings of the fourth International Symposium on Process Physics and Modeling in Semiconductor Devices. Srinivasan G.R., Murthy C.S., Dunhan S.T., editors. Pennington, NJ: Electrochemical Society
- (1996) Electrochemical Society Proceedings , vol.96 , Issue.4
- Cowern, N.E.B.¹ Kersten, W.J.² De Kruif, R.C.M.³ Van Berkum, J.G.M.⁴ De Boer, W.B.⁵ Gravesteijn, D.J.⁶ Bulle-Liewma, C.W.T.⁷

6
- 36449003027
- (1993) Appl Phys Lett , vol.62 , pp. 612
- Kuo, P.¹ Hoyt, J.L.² Gibbons, J.F.³ Turner, J.E.⁴ Jacowitz, R.D.⁵ Kamins, T.I.⁶

7
- 36449006281
- (1995) Appl Phys Lett , vol.66 , pp. 580
- Kuo, P.¹ Hoyt, J.L.² Gibbons, J.F.³ Turner, J.E.⁴ Lefforge, D.⁵

8
- 0000123394
- (1996) Phys Rev Lett , vol.76 , pp. 3372
- Kringhoj, P.¹ Nylandsted-Larsen, A.² Shirayev, S.Y.³

9
- 0000507929
- (1995) Appl Phys , vol.78 , pp. 3664
- Park, H.¹ Jones, K.S.² Slinkman, J.A.³ Law, M.E.⁴

10
- 0000775581
- (1997) Appl Phys Lett , vol.70 , pp. 2810
- Aziz, M.J.¹

11
- 0031353974
- (1997) Mater Res Soc Symp Proc , vol.469 , pp. 37
- Aziz, M.J.¹

12
- 0002042669
- (1999) Appl Phys Lett , vol.74 , pp. 31
- Zhao, Y.¹ Aziz, M.J.² Gossmann, H.J.³ Mitha, S.⁴ Schiferl, D.⁵

13
- 0001606242
- (1999) Appl Phys Lett , vol.75 , pp. 941
- Zhao, Y.¹ Aziz, M.J.² Gossmann, H.J.³ Mitha, S.⁴ Schiferl, D.⁵

14
- 4244179012
- (1957) J Phys Chem Solids , vol.3 , pp. 121
- Vineyard, G.H.¹

15
- 0022035026
- (1985) Acta Metall , vol.33 , pp. 331
- Larche, F.C.¹ Cahn, J.W.²

16
- 36449004985
- (1993) J Appl Phys , vol.73 , pp. 4955
- Spencer, B.J.¹ Voorhees, P.W.² Davis, S.H.³

17
- 0000016167
- (1978) Phys Rev B , vol.17 , pp. 2524
- Dederichs, P.H.¹ Schroeder, K.²

18
- 0000005946
- (1991) Phys Rev B , vol.44 , pp. 9812
- Aziz, M.J.¹ Sabin, P.C.² Lu, G.-Q.³

19
- 36849114090
- (1970) J Appl Phys , vol.41 , pp. 3186
- Jeffery, R.N.¹ Lazarus, D.²

20
- 25544442018
- (1985) Phys Rev B , vol.31 , pp. 3930
- Werner, M.¹ Mehrer, H.² Hochheimer, H.D.³

21
- 0015742781
- (1973) Phys Stat Sol (B) , vol.60 , pp. 595
- Hu, S.M.¹

22
- 24844463520
- (1985) Appl Phys Lett , vol.47 , pp. 105
- Nygren, E.¹ Aziz, M.J.² Turnbull, D.³ Poate, J.M.⁴ Jacobson, D.C.⁵ Hull, R.⁶

23
- 0022265431
- (1985) Mater Res Soc Symp Proc , vol.36 , pp. 101
- Aziz, M.J.¹ Nygren, E.² Christie, W.H.³ White, C.W.⁴ Turnbull, D.⁵

24
- 0002929915
- (1990) J Chem Soc Faraday Trans , vol.86 , pp. 1293
- Sodervall, U.¹ Friesel, M.² Lodding, A.³

25
- 0001051163
- (1997) Phys Rev B , vol.55 , pp. 14279
- Tang, M.¹ Colombo, L.² Zhu, J.³ Diaz de la Rubia, T.⁴

26
- 0001528106
- (1997) Appl Phys Lett , vol.71 , pp. 3862
- Gossmann, H.-J.¹ Haynes, T.E.² Stolk, P.A.³ Jacobson, D.C.⁴ Gilmer, G.H.⁵ Poate, J.M.⁶ Luftman, H.S.⁷ Mogi, T.K.⁸ Thompson, M.O.⁹

27
- 0001180989
- (1999) J Appl Phys , vol.85 , pp. 6440
- Ural, A.¹ Griffin, P.B.² Plummer, J.D.³

28
- 0001095308
- (1989) Phys Rev B , vol.40 , pp. 10643
- Antonelli, A.¹ Bernholc, J.²

29
- 0035878440
- (2001) Phys Rev B , vol.64 , pp. 45205
- Daw, M.S.¹ Windl, W.² Carlson, N.N.³ Laudon, M.⁴ Masquelier, M.P.⁵

30
- 0001353241
- (1998) Phys Rev Lett , vol.81 , pp. 2088
- Antonelli, A.¹ Kaxiras, E.² Chadi, D.J.³

31
- 0000342445
- (1992) Phys Rev B , vol.46 , pp. 12335
- Sugino, O.¹ Oshiyama, A.²

32
- 0033532470
- (1999) J Phys D , vol.32 , pp. 1252
- Xie, J.¹ Chen, S.P.²

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.