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Volumn 469, Issue , 1997, Pages 37-45
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Nonhydrostatic stress effects on boron diffusion in Si
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Author keywords
[No Author keywords available]
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Indexed keywords
ANISOTROPY;
DIFFUSION IN SOLIDS;
HYDROSTATIC PRESSURE;
SINGLE CRYSTALS;
STRAIN;
STRESS ANALYSIS;
THERMODYNAMICS;
NONHYDROSTATIC STRESS;
SEMICONDUCTING SILICON;
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EID: 0031353974
PISSN: 02729172
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1557/proc-469-37 Document Type: Conference Paper |
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Times cited : (9)
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References (11)
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