Electromechanical analysis of micromechanical SOI-fabricated RF resonators

2000 International Conference on Modeling and Simulation of Microsystems - MSM 2000

Volumn , Issue , 2000, Pages 217-220

  Lamminmaki T ^a   Ruokonen, K ^a   Tittonen, I ^a   Manila, T ^b   Jaakkola, O ^b   Oja, A ^b   Seppa H ^b   Seppala P ^b   Kiihamaki J ^b  

^a AALTO UNIVERSITY   (Finland)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

Author keywords

Electromechanical modeling; Equivalent circuit; FEM; Mechanical non linearity; SOI resonator

Indexed keywords

CMOS INTEGRATED CIRCUITS; COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; ELECTROMECHANICAL DEVICES; EQUIVALENT CIRCUITS; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; SILICON ON INSULATOR TECHNOLOGY;

ELECTROMECHANICAL ANALYSIS; ELECTROMECHANICAL MODELING; MECHANICAL NON-LINEARITY; SILICON ON INSULATOR (SOI) RESONATORS;

RESONATORS;

EID: 0003778128     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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