Closed-loop silicon accelerometers

IEE Proceedings: Circuits, Devices and Systems

Volumn 145, Issue 5, 1998, Pages 325-331

  Kraft, M ^a   Lewis, C P ^b   Hesketh, T G ^b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b Institute for Clean Growth and Future Mobility   (United Kingdom)

Author keywords

Closed loop accelerometers; Control systems; Low frequency applications; Mathematical models

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; COMPUTER SIMULATION; DIGITAL CIRCUITS; MATHEMATICAL MODELS; MICROMACHINING; PERFORMANCE; SILICON SENSORS;

CLOSED LOOP ACCELEROMETERS;

ACCELEROMETERS;

EID: 0032183428     PISSN: 13502409     EISSN: None     Source Type: Journal    
DOI: 10.1049/ip-cds:19982275     Document Type: Article

References (24)

1. LEWIS, C.P., KRAFT, M., and HESKETH, T.G.: 'Mathematical model for a micromachined accelerometer', Trans. Inst. Meas. Control, 1996, 18, (2), pp. 92-98
2. VAN KAMPEN, R.P., VELLEKOOP, M., SARRO, P., and WOLFFENBUTTEL, R.F.: 'Application of electrostatic feedback to critical damping of an integrated silicon accelerometer', Sens. Actuators A, Phys., 1994, A 43, pp. 100-106
3. ZIMMERMANN, L., EBERSOHL, J., LE HUNG, F., BERRY, J.P., BAILLIEU, F., REY, P., DIEM, B., RENARD, S., and CAILLAT, P.: 'Airbag application: a microsystem including a silicon capacitive accelerometer CMOS switched capacitor electronics and true self-test capability', Sens. Actuators A, Phys., 1995, A 46-47, pp. 190-195
4. WARREN, K.: 'Electrostatically force-balanced silicon accelerometer', J. Inst. Nav., 1991, 38, (1), pp. 91-99
5. CHAU, K., LEWIS, S.R., ZHAO, Y., HOWE, R.T., BART, S.F., and MARCHESELLI, R.G.: 'An integrated force balanced capacitive accelerometer for low-g applications', Sens. Actuators A, Phys., 1996, A54, pp. 472-476
6. YUN, W., HOWE, R.T., and GRAY, P.: 'Surface micromachined, digitally force-balanced accelerometer with integrated CMOS detection circuitry'. Proceedings of IEEE Solid-state sensor and actuator workshop, Hilton Head Island, USA, 1992, pp. 126-131
7. DE COULON, Y., SMITH, T., HERMANN, J., CHEVROULET, M., and RUDOLF, F.: 'Design and test of a precision servoaccelerometer with digital output'. Proceedings of 7th international conference on Solid-state sensors and actuators (Transducer '93), Yokohama, Japan, 1993, pp. 832-835
8. HENRION, W., DISANZA, L., IP, M., TERRY, S., and JERMAN, H.: 'Wide dynamic range direct digital accelerometer'. Proceedings of IEEE Solid-state sensor and actuator workshop, Hilton Head Island, USA, 1990, pp. 153-157
9. LU, C., LEMKIN, M., and BOSER, B.: 'A monolithic surface micromachined accelerometer with digital output', IEEE J. Solid-State Circuits, 1995, 30, (12), pp. 1367-1373
10. SMITH, T., NYS, O., CHEVROULET, M., DE COULON, Y., and DEGRAUWE, M.: 'Electro-mechanical sigma-delta "converter for acceleration measurements'. Proceedings of IEEE international Solid-state circuits conference, San Francisco, USA, 1994,pp. 160-161
11. FEDDER, G.K., and HOWE, R.T.: 'Multimode digital control of a suspended polysilicon microstructure', J. Microelectromech. Syst., 1996, 5, (4), pp. 283-297
12. WUESTLING, S., FROMHEIM, O., GEMMEKE, H., TSCHUCH, M., and WOLLERSHEIM, O.: 'Planar-assembly triaxial microaccelerometer with electromechanical sigma-delta ADCS', Sens. Actuators A, Phys., 1997, A61, pp. 440-436
13. SPINEANU, A., BENABES, P., and KIELBASA, R.: 'A piezoelectric accelerometer with sigma-delta servo technique', Sens. Actuators A, Phys., 1997, A60, pp. 127-133
14. BAXTER, L.: 'Capacitive sensors' (IEEE Press, New York, 1997)
15. KRAFT, M.: 'Closed loop accelerometer employing oversampling conversion'. PhD dissertation, School of Engineering, Coventry University, 1997
16. SENTURIA, S.: 'Simulation and design of microsystems: a ten year perspective'. EUROSENSOR XI, Warsaw, Poland, Sept. 1997, pp. 3-13
17. LEWIS, C.P., and KRAFT, M.: 'Simulation of a micromachined digital accelerometer in SIMULINK and PSPICE'. Proceedings of UKACC international conference on Control, Exeter, UK, Sept. 1996, Vol. 1, pp. 205-209
18. KRAFT, M., and LEWIS, C.P.: 'System level simulation of a digital accelerometer'. Proceedings of conference on Modelling and simulation of microsystems, semiconductors, sensors and actuators, MSM 98, Santa Clara, USA, April 1998
19. STARR, J.B.: 'Squeeze-film damping in solid state accelerometers'. Proceedings of IEEE Solid-state sensor and actuator workshop, Hilton Head Island, USA, 1990, pp. 44-47
20. GELB, A., VANDER VELDE, W.: 'Multiple input describing functions' (McGraw-Hill, London, 1968)
21. LEWIS, C.P.: 'Prediction of limit cycle conditions in nonlinear sampled data systems', Trans. Inst. Meas. Control, 1979, 1, (49), pp. 199-203
22. CANDY, J.C.: 'Decimation for sigma delta modulation', IEEE Trans., 1986, COM-34, (1), pp. 72-76
23. KUEHNEL, W., and SHERMAN, S.: 'A surface micromachined silicon accelerometer with on-chip detection circuitry', Sens. Actuators A, Phys., 1994, A45, pp. 7-16
24. BOSER, B.E., and WOOLEY, B.A.: 'The design of sigma-delta modulation analogto-digital converters', IEEE J. Solid-State Circuits, 1988, 23, (6), pp. 1298-1308