Multilevel-spiral inductors using VLSI interconnect technology

IEEE Electron Device Letters

Volumn 17, Issue 9, 1996, Pages 428-430

  Burghartz, Joachim N ^a,b   Jenkins, Keith A ^b   Soyuer, Mehmet ^a,b  

^a IEEE

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTROL EQUIPMENT; ELECTRIC COILS; ELECTRIC WIRING; INTEGRATED CIRCUIT MANUFACTURE; METALLIC FILMS; NATURAL FREQUENCIES; Q FACTOR MEASUREMENT; VLSI CIRCUITS;

BICMOS TECHNOLOGY; INDUCTANCES; MAGNETIC FLUX; MAXIMUM QUALITY FACTORS; MULTILEVEL SPIRAL INDUCTORS; STACKED SPIRAL COILS; VLSI INTERCONNECT TECHNOLOGY;

ELECTRIC INDUCTORS;

EID: 0030243085     PISSN: 07413106     EISSN: None     Source Type: Journal    
DOI: 10.1109/55.536282     Document Type: Article

References (10)

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