Atomic models of (√3×√3)R30° reconstruction on hexagonal 6H-SiC(0001) surface

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 19, Issue 5, 2001, Pages 1972-1975

  Han, Y ^a,c   Aoyama, T ^a   Ichimiya, A ^a   Hisada, Y ^b   Mukainakano, S ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b DENSO CORPORATION   (Japan)

^c NATIONAL RESEARCH COUNCIL CANADA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL ATOMIC STRUCTURE; MONOLAYERS; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SINGLE CRYSTALS; WSI CIRCUITS;

ADATOM STRUCTURES;

SILICON CARBIDE;

EID: 0035441522     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1406152     Document Type: Article

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