Single mask lateral tunneling accelerometer

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 1998, Pages 340-344

  Hartwell, P G ^a   Bertsch, F M ^a   Miller, S A ^a   Turner, K L ^a   MacDonald, N C ^a  

^a Department of Obstetrics Gynecology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; BANDWIDTH; MASKS; MICROMACHINING; NATURAL FREQUENCIES; SILICON; SINGLE CRYSTALS; TUNNELING MACHINES;

HIGH ASPECT RATION SINGLE CRYSTAL SILICON SPRINGS; SINGLE MASK LATERAL TUNNELING ACCELEROMETER;

ACCELEROMETERS;

EID: 0031677503     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (16)