Study of tunneling noise using surface micromachined tunneling tip devices

International Conference on Solid-State Sensors and Actuators, Proceedings

Volumn 1, Issue , 1997, Pages 467-470

  Wang, Jianchao ^a   Zavracky, Paul M ^a   McGruer, N E ^a   Morrison, Richard H ^a  

^a NORTHEASTERN UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ELECTRODES; ELECTRON TUNNELING; ELECTROPLATING; MATHEMATICAL MODELS; MICROMACHINING; SIGNAL NOISE MEASUREMENT; SIGNAL TO NOISE RATIO; SPURIOUS SIGNAL NOISE; VACUUM;

SURFACE MACHINING;

MICROELECTROMECHANICAL DEVICES;

EID: 0030686981     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)