A search for strain gradients in gold thin films on substrates using x-ray diffraction

Journal of Applied Physics

Volumn 88, Issue 3, 2000, Pages 1389-1396

  Leung, O S ^a   Munkholm, A ^b   Brennan, S ^c   Nix, W D ^a  

^a Stanford University   (United States)

^b ARGONNE NATIONAL LABORATORY   (United States)

^c SLAC NATIONAL ACCELERATOR LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001410007     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.373828     Document Type: Article

References (26)

1. N. A. Fleck, G. M. Muller, M. F. Ashby, and J. W. Hutchinson, Acta Metall. Mater. 42, 475 (1994).
2. J. S. Stolken and A. G. Evans, Acta Mater. 46, 5109 (1998).
3. W. D. Nix and H. Gao, J. Mech. Phys. Solids 46, 411 (1998).
4. R. P. Vinci, E. M. Zielinski, and J. C. Bravman, Thin Solid Films 262, 142 (1995).
5. R. Venkatraman, P. R. Besser, J. C. Bravman, and S. Brennan, J. Mater. Res. 9, 328 (1994).
6. W. D. Nix, Metall. Trans. A 20, 2217 (1989).
7. C. V. Thompson, J. Mater. Res. 8, 237 (1993).
8. J. W. Hutchinson, Int. J. Solids Struct. 37, 225 (2000).
9. M. L. Ovecoglu, D. M. Barnett, and W. D. Nix, Acta Metall. 35, 1779 (1987).
10. M. F. Doerner and S. Brennan, J. Appl. Phys. 63, 126 (1988).
11. C. J. Shute and J. B. Cohen, J. Appl. Phys. 70, 2104 (1991).
12. M. S. Jackson and C.-Y. Li, Acta Metall. 30, 1993 (1982).
13. R. Venkatraman, J. C. Bravman, W. D. Nix, P. W. Davies, P. A. Flinn, and D. B. Fraser, J. Electron. Mater. 19, 1231 (1990).
14. M. J. Kobrinsky and C. V. Thompson, Appl. Phys. Lett. 73, 2429 (1998).
15. S. L. Neumann, Master's research report, Stanford University, 1995.
16. I. Shalish and Y. Shapira, J. Vac. Sci. Technol. B 17, 166 (1999).
17. R. M. Keller, W. Sigle, S. P. Baker, O. Kraft, and E. Arzt, in Thin Films: Stresses and Mechanical Properties VI. Symposium, edited by W. W. Gerherich (Materials Research Society, Pittsburgh, PA, 1997), pp. 221-226.
18. E. Stach (private communication).
19. P. A. Flinn, W. D. Nix, D. M. Barnett and D. A. Smith, in Thin Films: Stresses and Mechanical Properties Symposium, edited by J. C. Bravman (Materials Research Society, Pittsburgh, PA, 1989), pp. 41-51.
20. R. M. Keller, S. Bader, R. P. Vinci, and E. Arzt, in Thin Films: Stresses and Mechanical Properties V. Symposium, edited by S. P. Baker (Materials Research Society, Pittsburgh, PA, 1995), pp. 453-458.
21. R. M. Keller, W. M. Kuschke, A. Kretschmann, S. Bader, R. P. Vinci, and E. Arzt, in Materials Reliability in Microelectronics V. Symposium, edited by A. S. Oates (Materials Research Society, Pittsburgh, PA, 1995), pp. 309-314.
22. B. M. Clemens and J. A. Bain, MRS Bull. 17, 46 (1992).
23. S. Brennan, A. Munkholm, O. S. Leung, and W. D. Nix, Physica B 283, 125 (2000).
24. S. G. Malhotra, Z. U. Rek, S. M. Yalisove, and J. C. Bilello, J. Appl. Phys. 79, 6872 (1996).
25. M. F. Toney and S. Brennan, Phys. Rev. B 39, 7963 (1989).
26. J. Hirth and J. Lothe, Theory of Dislocations (McGraw-Hill, New York, 1968), p. 176.