Effect of a surface layer on the stress relaxation of thin films

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 4, 1996, Pages 2454-2461

  Thouless, M D ^a   Rodbell, K P ^b   Cabral Jr , C ^b  

^a UNIVERSITY OF MICHIGAN   (United States)

^b IBM T J WATSON RESEARCH CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030507877     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.580036     Document Type: Article

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