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Volumn 230, Issue 1-2, 2001, Pages 239-246
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Heat transfer and kinetics of bulk growth of silicon carbide
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Author keywords
A1. Computer simulation; A1. Diffusion; A1. Growth models; A1. Mass transfer; A2. Growth from vapor; B2. Semiconducting silicon
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Indexed keywords
COMPUTER SIMULATION;
DIFFUSION IN SOLIDS;
HEAT CONDUCTION;
HEAT RADIATION;
INDUCTION HEATING;
MASS TRANSFER;
MATHEMATICAL MODELS;
SEMICONDUCTING SILICON COMPOUNDS;
SEMICONDUCTOR GROWTH;
SUPERSATURATION;
THERMAL GRADIENTS;
MAGNETIC VECTOR POTENTIAL THEORY;
SILICON CARBIDE;
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EID: 0035425749
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(01)01338-0 Document Type: Conference Paper |
Times cited : (24)
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References (17)
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