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Volumn 211, Issue 1, 2000, Pages 325-332
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Status of SiC bulk growth from an industrial point of view
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Author keywords
[No Author keywords available]
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Indexed keywords
DISLOCATIONS (CRYSTALS);
GEMS;
HEAT TRANSFER;
LIGHT EMITTING DIODES;
NITRIDES;
SEMICONDUCTOR DEVICE MANUFACTURE;
SILICON CARBIDE;
SILICON WAFERS;
SUBSTRATES;
THERMOELASTICITY;
MICROPIPE;
MOISSANITE;
THERMOELASTIC STRESS;
VAPOR GROWTH;
CRYSTAL GROWTH;
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EID: 0042977079
PISSN: 00220248
EISSN: None
Source Type: Journal
DOI: 10.1016/S0022-0248(99)00835-0 Document Type: Article |
Times cited : (127)
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References (18)
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