Intrinsic stress in chemical vapor deposited diamond films: An analytical model for the plastic deformation of the Si substrate

Journal of Applied Physics

Volumn 90, Issue 3, 2001, Pages 1227-1236

  Jeong, J H ^a   Kwon, D ^a   Lee, W S ^b   Baik, Y J ^b  

^a Seoul National University   (South Korea)

^b Korea Institute of Science and Technology   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035423422     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1383263     Document Type: Article

References (27)

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