Intrinsic stress and its relaxation in diamond film deposited by hot filament chemical vapor deposition

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 14, Issue 1, 1996, Pages 165-169

  Choi, S K ^a   Jung, D Y ^a   Choi, H M ^a  

^a Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0030547788     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.579914     Document Type: Article

References (26)

1. K. E. Spear, J. Am. Ceram. Soc. 72, 171 (1989).
2. F. M. d'Heurle, Thin Solid Films 171, 81 (1989).
3. H. Windishmann and G. F. Epps, J. Appl. Phys. 69, 2231 (1991).
4. N. S. Van Damme, D. C. Nagle, and S. R. Winzer, Appl. Phys. Lett. 58, 2919 (1991).
5. J. A. Baglio, B. C. Farnsworth, S. Hankin, G. Hamill, and D. O'Neil, Thin Solid Films 212, 180 (1992).
6. E. D. Specht, R. E. Clausing, and L. Heatherly, J. Mater. Res. 5, 2351 (1990).
7. P. R. Chalker, A. M. Jones, C. Johnston, and I. M. Buckley-Golder, Surf. Coat. Technol. 47, 365 (1991).
8. H. Guo and M. Alam, Thin Solid Films 212, 173 (1992).
9. M. Yoshikawa, G. Katagiri, H. Ishida, and A. Ishitani, Appl. Phys. Lett. 55, 2608 (1989).
10. W. Wanlu, L. Kejun, G. Jinying, and L. Aimin, Thin Solid Films 215, 174 (1992).
11. W. B. Alexander, P. H. Holloway, and J. Simmons, J. Vac. Sci. Technol. A 12, 2943 (1994).
12. S. R. Sails, D. J. Gardiner, and M. Bowden, Appl. Phys. Lett. 65, 43 (1994).
13. B. S. Berry, W. C. Pritchet, J. J. Cuomo, C. R. Guarnieri, and S. J. Whitehair, Appl. Phys. Lett. 57, 302 (1990).
14. A. Sawabe and T. Inuzuka, Thin Solid Films 137, 89 (1986).
15. The Properties of Diamonds, edited by J. E. Field (Academic, London, 1979).
16. H. K. Pulker and J. Maser, Thin Solid Films 59, 65 (1979).
17. C. H. Lee, T. D. Fu and Y. F. Chen, J. Mater. Sci. 28, 170 (1993).
18. F. A. Doljack and R. W. Hoffman, Thin Solid Films 12, 71 (1972).
19. G.-H. M. Ma, Y. H. Lee, and J. T. Glass, J. Mater. Res. 5, 2637 (1990).
20. Y. H. Lee, P. D. Richard, K. J. Bachmann, and J. T. Glass, Appl. Phys. Lett. 56, 620 (1990).
21. B. E. Williams and J. T. Glass, J. Mater. Res. 4, 373 (1989).
22. D. N. Belton, S. J. Harris, S. J. Schmieg, A. M. Weiner, and T. A. Perry, Appl. Phys. Lett. 54, 416 (1989).
23. R. Meilunas, M. S. Wong, K. C. Sheng, R. P. H. Chang, and R. P. Van Dugne, Appl. Phys. Lett. 54, 2204 (1989).
24. B. E. Williams, J. T. Glass, R. F. Davis, and K. Kobashi, J. Cryst. Growth 99, 1168 (1990).
25. D. J. Pickrell, W. Zhu, A. R. Badzian, R. E. Newnhan, and R. Messier, J. Mater. Res. 6, 1264 (1991).
26. C. Tsai, W. Gerberich, Z. P. Lu, J. Heberlein, and E. Pfender, J. Mater. Res. 6, 2127 (1991).